By reading the log carefully, I found that because there is a key Key:SOFTWARE\Microsoft\AzureMonitorAgent\Secrets, Name:PersistenceKeyCreated is present, but key file does not exist in data store, which blocks the AMA from starting.
So I deleted the key PersistenceKeyCreated and reboot the VM, the status finally changed to Provisioning succeeded, and I can do operations like Check for updates in Azure Update Manager.
According to another question, reboot seems not necessary.